JPH0372353B2 - - Google Patents

Info

Publication number
JPH0372353B2
JPH0372353B2 JP57025333A JP2533382A JPH0372353B2 JP H0372353 B2 JPH0372353 B2 JP H0372353B2 JP 57025333 A JP57025333 A JP 57025333A JP 2533382 A JP2533382 A JP 2533382A JP H0372353 B2 JPH0372353 B2 JP H0372353B2
Authority
JP
Japan
Prior art keywords
film
electrode film
vapor
deposited film
nozzle plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57025333A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58143186A (ja
Inventor
Kazushi Yamamoto
Takeshi Nagai
Nobuyuki Hirai
Shunichiro Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57025333A priority Critical patent/JPS58143186A/ja
Publication of JPS58143186A publication Critical patent/JPS58143186A/ja
Publication of JPH0372353B2 publication Critical patent/JPH0372353B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Electromagnetic Pumps, Or The Like (AREA)
  • Reciprocating Pumps (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
JP57025333A 1982-02-18 1982-02-18 霧化ポンプの接合方法 Granted JPS58143186A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57025333A JPS58143186A (ja) 1982-02-18 1982-02-18 霧化ポンプの接合方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57025333A JPS58143186A (ja) 1982-02-18 1982-02-18 霧化ポンプの接合方法

Publications (2)

Publication Number Publication Date
JPS58143186A JPS58143186A (ja) 1983-08-25
JPH0372353B2 true JPH0372353B2 (en]) 1991-11-18

Family

ID=12162997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57025333A Granted JPS58143186A (ja) 1982-02-18 1982-02-18 霧化ポンプの接合方法

Country Status (1)

Country Link
JP (1) JPS58143186A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4006152A1 (de) * 1990-02-27 1991-08-29 Fraunhofer Ges Forschung Mikrominiaturisierte pumpe

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51138191A (en) * 1975-05-23 1976-11-29 Yoshiharu Taniguchi Method of manufacturing ultrasonic transmitter/receiver
JPS5397617U (en]) * 1977-01-12 1978-08-08

Also Published As

Publication number Publication date
JPS58143186A (ja) 1983-08-25

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